GISAXS - Glancing incidence small angle X-ray scattering

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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

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Characterization of Polymer Thin Films with Small-Angle X-ray Scattering under Grazing Incidence (GISAXS)

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Structure of glancing incidence deposited TiO(2) thin films as revealed by grazing incidence small-angle X-ray scattering.

For the first time, grazing incidence small-angle X-ray scattering (GISAXS) analysis is used to characterize the morphology of TiO(2) thin films grown by glancing angle physical vapor deposition (GLAD). According to cross-section scanning electron microscopy (SEM) images, the films consist of near isotilted TiO(2) columns of different length and width depending on film thickness. The obtained G...

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ژورنال

عنوان ژورنال: Le Journal de Physique IV

سال: 1993

ISSN: 1155-4339

DOI: 10.1051/jp4:1993885